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Vacuum-Resistant Sensors for Semiconductor Industry

Custom Single Ended Shear Beam

Wafer growing is one of the core processes in the foundation of a high-quality semiconductor production. These high precision procedures demand strict environmental condition control for temperature, humidity, and ambient pressure. The entire procedure is conducted in a vacuum to ensure wafer purity while precisely controlling material addition by weight to guarantee continuous and stable growth. Any fluctuation in the vacuum environment or inaccuracies in weighing directly results in lower wafer purity and instability, reducing the performance yield of the final chips. Using custom ANYLOAD load cells designed for operation in a strong vacuum environment, material dosing remains accurate, reliably producing higher performing wafers.

도전 과제

  1. Air Bubbles During Assembly: Traditional strain gauge bonding techniques often leave microscopic bubbles. In strong vacuum environments, these pressure differentials will cause the bubbles to expand, changing the strain gauge reading or damaging the sensor.
  2. Wire Impedance Drift: Conventional wires release volatile substances in a vacuum (known as “outgassing”) which affects wire impedance, signal transmission, and the overall precision of the load cell.
  3. Seal Expansion: Regular sealing methods can expand in vacuum environments, exposing the strain gauges to moisture and other elements. Seal expansion can also release contaminants, polluting the wafer growth environment.
  4. Unstable Compensation Performance: The impedance of an ordinary sensor varies significantly between atmospheric and vacuum environments, creating deviations in sensor output and unreliable weighing results.

솔루션

  1. A custom vacuum-resistant load cell is developed specifically for the customer’s wafer growth process, carefully addressing each challenge the environment presents.
  2. A proprietary bonding technique is paired with high-precision fixtures to ensure strain gauges and other elements achieve perfect adhesion without the addition of micro-bubbles, safeguarding data accuracy even under extreme vacuum
  3. High-performance vacuum-resistant wires replace standard load cell conductors, with both ends hermetically sealed to prevent noticeable pressure changes inside the load cell.
  4. All sealing materials undergo pre-treatment within vacuum chambers to fully eliminate outgassing and ensure the specially formulated adhesive does not change behaviour under vacuum conditions, maintaining the strain gauge’s moisture resistance and integrity.

결론

ANYLOAD has developed and selected its own materials and technologies for vacuum environment applications. Production processes have been specially optimized for these strict environments, with certain steps being completed under vacuum conditions, ensuring the sensor maintains superior performance in critical settings.

Field testing confirms the sensors can operate reliably in pressure as low as 1 Pa, allowing broad use in aerospace manufacturing, pharmaceutical material weight control, solar photovoltaic panels, and others. For industries with stringent requirements for vacuum operation and accuracy, ANYLOAD vacuum-resistant sensors enhance production efficiency, product quality, reduce costs, and provide reliable weighing for advanced manufacturing.

문의 제출
AL-Vacuum-Resistant-Sensors

키워드:
Vacuum-resistant, sensor, strain gauges, moisture, vacuum operation.

주요 제품

563YX-AS-VAC
싱글 엔드 빔 로드셀
표준 버전을 참조하세요.

ANYLOAD의 고온 및 진공 전단 빔 로드셀은 표준 센서로는 부족한 환경을 위해 설계되었습니다. 항공 우주, 반도체 제조, 야금 및 고급 연구용으로 제작된 이 제품은 극한의 열 및 압력 조건에서 필요한 정확성과 안정성을 제공하는 동시에 고유한 프로젝트 요구 사항에 맞게 구성할 수 있는 유연성을 제공합니다.

563YHM4-02
압축 계량 모듈
표준 버전을 참조하세요.

The ANYLOAD 563YHM4-02 is an alloy steel compression weigh module designed to work with the 563YH shear beam load cell series, supporting capacities from 100lb – 20Klb (100kg – 10t). Built for conventional tank and vessel leg mounting, the module features a rocker pin design that accommodates 360° thermal expansion, integral jacking for simplified load cell removal and installation, and both uplift and overload protection with lateral stops.

815BS
Weight Indicator
표준 버전을 참조하세요.

The ANYLOAD 815BS is a weatherproof LCD industrial weight indicator designed for legal-for-trade and process weighing applications in demanding plant environments. Its 1.0″ 6-digit, 7-segment display features a tri-color backlight (green, red, and amber) for clear status indication, while the NEMA4X/IP66-rated stainless steel enclosure with breather vent protects the unit from washdown, moisture, and condensation.

사례 연구 살펴보기

애니로드의 563YS 싱글 엔드 빔 로드셀을 사용한 비료 카트.

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